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SEMI E87-0524 (technical revision)
This Standard includes the description of the physical connector
*This Safety Guideline has the option to purchase the Current document with a redline document (Current + Redline)
orgで。初版は1995年発行，前版は2003年7月に発行された。
1-1104 (Reapproved 0710)
E11700 - SEMI E117 - Specification for Reticle Load Port Revision:SEMI E117-1102 - Superseded SEMI E87-0524 (technical revision)NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Specification defines dimensional requirements and options of reticle load ports on reticle stockers, lithography exposure equipment, and reticle inspection equipment. It is intended to promote a uniform physical
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